ACCUEIL

Consignes aux
auteurs et coordonnateurs
Nos règles d'éthique
Autres revues >>

Nano et Micro Technologies

1469-3399
Parution suspendue
 

 ARTICLE VOL 3/1-2 - 2003  - pp.9-34
TITLE
Non-optical lithography

ABSTRACT
This paper provides an overview of emerging nanopatterning approaches and in particular nanoimprint lithography. The highlights in nanoimprinting are listed as well as the key issues to be overcome for nanoimprinting to become a viable nanofabrication technology. Stamps and adhesion are discussed in the context of throughput and new polymer materials especially developed for nanoimprinting are reviewed. The state of the art and potential applications are described. Among the applications the most salient is in passive optical elements. Recently proposed possible nanofabrication methods are discussed.


AUTEUR(S)
Clivia M. SOTOMAYOR TORRES

KEYWORDS
Nanoimprint lithography, hot embossing, polymer moulding.

LANGUE DE L'ARTICLE
Anglais

 PRIX
• Abonné (hors accès direct) : 34.95 €
• Non abonné : 34.95 €
|
|
--> Tous les articles sont dans un format PDF protégé par tatouage 
   
ACCÉDER A L'ARTICLE COMPLET  (2,95 Mo)



Mot de passe oublié ?

ABONNEZ-VOUS !

CONTACTS
Comité de
rédaction
Conditions
générales de vente

 English version >> 
Lavoisier