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Nano et Micro Technologies

1469-3399
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 ARTICLE VOL 3/1-2 - 2003  - pp.59-70
TITLE
Quantitative nanoscale characterisation by electron microscopy

ABSTRACT
The transmission electron microscope (TEM) is a choice instrument for the characterisation of materials and devices at the nanoscale. Apart from high spatial resolution, TEM offers a number of signals which can be exploited to obtain chemical and structural information concerning the specimen. Recent years have seen considerable advances in the use of electron microscopy and new techniques have been developed thanks to improved methodology, instrumentation and data acquisition systems. Here, we present a review of three such techniques particularly well suited for the study of nanoscale devices: strain mapping by high-resolution electron microscopy (HREM), elemental mapping by energy filtered microscopy (EFTEM), and measurements of magnetic and electric fields by electron holography.


AUTEUR(S)
Martin HŸTCH, Pascale BAYLE-GUILLEMAUD, Etienne SNOECK, Rafal DUNIN-BORKOWSKI

KEYWORDS
transmission electron microscopy, electron holography, chemical mapping, strain.

LANGUE DE L'ARTICLE
Anglais

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