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Nano et Micro Technologies

1469-3399
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 ARTICLE VOL 2/1-2 - 2002  - pp.9-34
TITLE
From Microelectronics to Microtechnologies

ABSTRACT

Microtechnologies have been inspired and massively pushed ahead by Microelectronics in the decade following 1990. At that starting point almost every method and process was borrowed from Microelectronics. During this decade Microsystems/MEMS have found broadest acceptance in the field of Automotive Sensors and Inkjet Printheads. With the advancement of Microsystems in other key applications such as Telecommunication and Biomedical the number of dedicated processes and equipment is steadily growing. Most products on market today can no longer be made with expert knowledge in Microelectronics alone, a thorough understanding of Microtechnology is substantial. After an overview of MEMS/MST specific issues in processing the paper will show selected examples from MEMS in the field of Automotive sensors and Telecommunication.

AUTEUR(S)
Robert AIGNER

KEYWORDS
MEMS Technology, Micromachining Process, Automotive Sensors, CMOS Microsystems, Material Parameters.

LANGUE DE L'ARTICLE
Anglais

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