From Microelectronics to Microtechnologies
Microtechnologies have been inspired and massively pushed ahead by
Microelectronics in the decade following 1990. At that starting point almost every method
and process was borrowed from Microelectronics. During this decade Microsystems/MEMS
have found broadest acceptance in the field of Automotive Sensors and Inkjet Printheads.
With the advancement of Microsystems in other key applications such as Telecommunication
and Biomedical the number of dedicated processes and equipment is steadily growing. Most
products on market today can no longer be made with expert knowledge in Microelectronics
alone, a thorough understanding of Microtechnology is substantial. After an overview of
MEMS/MST specific issues in processing the paper will show selected examples from MEMS
in the field of Automotive sensors and Telecommunication.
MEMS Technology, Micromachining Process, Automotive Sensors, CMOS Microsystems, Material Parameters.