Surface Micro-Machining, an Overview
This article presents a general overview of the surface micro-machining, a key
processing technology that permitted a significant development of Microsystems. The surface
micromachining is an efficient process technology to realise free standing micro-patterns on
the wafer surface. It will be reviewed from its very simple basic technique to now available
complex multilayers technologies. Mostly polysilicon based processes are detailed,
nevertheless the micromachining of alternative materials is also addressed.
Dominique COLLARD, Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, Bernard LEGRAND, Lionel BUCHAILLOT
Surface Micromachining, Polysilicon Technology, Microsystem, Review.