Bulk Micro-Machining and MEMS Packaging
MEMS (Micro Electro Mechanical Systems) have been developed based on a
silicon bulk micromachining. Nanometer size structures are built-in the MEMS for data
storage and electron field emission. High density electrical feedthrough was made in glass for
the electrical interconnection between array MEMS and integrated circuit. Sophisticated
MEMS as electrostatically levitated rotational gyroscope have been developed. Thin beam
resonators have been developed to achieve high sensitivity and high spatial resolution.
Deferent functional materials as PZT, SiC and CNT (carbon nano tube) have been combined
with MEMS for microactuators and micro energy sources.
Micromachining, Packaging, MEMS Array, Resonators, Nano Heater, Micro