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Nano et Micro Technologies

1469-3399
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 ARTICLE VOL 2/1-2 - 2002  - pp.51-82
TITLE
Bulk Micro-Machining and MEMS Packaging

ABSTRACT

MEMS (Micro Electro Mechanical Systems) have been developed based on a silicon bulk micromachining. Nanometer size structures are built-in the MEMS for data storage and electron field emission. High density electrical feedthrough was made in glass for the electrical interconnection between array MEMS and integrated circuit. Sophisticated

MEMS as electrostatically levitated rotational gyroscope have been developed. Thin beam resonators have been developed to achieve high sensitivity and high spatial resolution. Deferent functional materials as PZT, SiC and CNT (carbon nano tube) have been combined with MEMS for microactuators and micro energy sources.

AUTEUR(S)
Masayoshi ESASHI

KEYWORDS
Micromachining, Packaging, MEMS Array, Resonators, Nano Heater, Micro

LANGUE DE L'ARTICLE
Anglais

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