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Nano et Micro Technologies

1469-3399
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 ARTICLE VOL 2/1-2 - 2002  - pp.221-248
TITLE
RF MEMS for Mobile Communications Era. Present and Future

ABSTRACT

This paper overviews the state-of-the-art in RF Micro-Electro-Mechanical-Systems (MEMS), including: (i) capacitive and contact RF switches, (ii) RF MEMS passives as direct replacement candidates for off-chip components and (iii) MEMS resonators for key RF circuit functions: filtering, mixing and frequency reference. Design, modelling, technology and performance are particularly addressed. It is shown that RF MEMS circuit applications such as re-configurable RF ICs (oscillators, filters), programmable filter banks, RF power amplifiers and programmable delay lines have been already demonstrated and some other ones, like all-MEMS RF front-end receiver will be very probably achieved in the near future. Finally, it is shown that some key factors for a successful take-off of RF MEMS are compatibility with CMOS, progress in RF MEMS reliability together with development of reliability assessment methods and development of on-wafer, low cost packaging processes.

AUTEUR(S)
Adrian M IONESCU

KEYWORDS
Radio-Frequency Micro-Electro-Mechanical-Systems (RF MEMS), Technology,Modelling, Switches, Passive Components, Resonators, Reliability.

LANGUE DE L'ARTICLE
Anglais

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