RF MEMS for Mobile Communications Era. Present and Future
This paper overviews the state-of-the-art in RF Micro-Electro-Mechanical-Systems
(MEMS), including: (i) capacitive and contact RF switches, (ii) RF MEMS passives as direct
replacement candidates for off-chip components and (iii) MEMS resonators for key RF
circuit functions: filtering, mixing and frequency reference. Design, modelling, technology
and performance are particularly addressed. It is shown that RF MEMS circuit applications
such as re-configurable RF ICs (oscillators, filters), programmable filter banks, RF power
amplifiers and programmable delay lines have been already demonstrated and some other
ones, like all-MEMS RF front-end receiver will be very probably achieved in the near future.
Finally, it is shown that some key factors for a successful take-off of RF MEMS are
compatibility with CMOS, progress in RF MEMS reliability together with development of
reliability assessment methods and development of on-wafer, low cost packaging processes.
Adrian M IONESCU
Radio-Frequency Micro-Electro-Mechanical-Systems (RF MEMS), Technology,Modelling, Switches, Passive Components, Resonators, Reliability.