From Microelectronics to Integrated Microsystems Testing
Recent developments in the field of integrated transducers have shown a clear
migration towards compact systems rather than just separate components. System-on-Chips
(SoCs) embedding sensors and actuators (or MEMS, Micro-Electro-Mechanical Systems),
regardless of their energy domain, will soon become a reality. The quality of these complex
systems can be significantly degraded by embedding MEMS components for which reliability
models are usually not well known. Much research is still required to bring MEMS design
and test in line with microelectronics state-of-the-art. This work provides an in-depth view of
the work being developed in our Laboratory on microsystem testing, from the study of new
micromachining defects and failure mechanisms to the development and evaluation of
suitable self-test strategies. Since MEMS are essentially analog devices, we are approaching
their test as an extension of the field of analog and mixed-signal electronic testing.
Similarities between the present development of MEMS testing and that of Microelecronics
testing in the last decades are pointed out.
Salvador MIR, Benoît CHARLOT
Microsystems, MEMS, Test, Self Test, CAD, Integrated Circuits.